JPS5591864U - - Google Patents
Info
- Publication number
- JPS5591864U JPS5591864U JP17802178U JP17802178U JPS5591864U JP S5591864 U JPS5591864 U JP S5591864U JP 17802178 U JP17802178 U JP 17802178U JP 17802178 U JP17802178 U JP 17802178U JP S5591864 U JPS5591864 U JP S5591864U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1978178021U JPS5842441Y2 (en) | 1978-12-19 | 1978-12-19 | Vapor deposition equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1978178021U JPS5842441Y2 (en) | 1978-12-19 | 1978-12-19 | Vapor deposition equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5591864U true JPS5591864U (en) | 1980-06-25 |
JPS5842441Y2 JPS5842441Y2 (en) | 1983-09-26 |
Family
ID=29188083
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1978178021U Expired JPS5842441Y2 (en) | 1978-12-19 | 1978-12-19 | Vapor deposition equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5842441Y2 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5018974A (en) * | 1973-06-22 | 1975-02-27 | ||
JPS5018454U (en) * | 1973-06-19 | 1975-02-28 | ||
JPS5161782A (en) * | 1974-11-27 | 1976-05-28 | Hitachi Ltd | PATAANSAKUSEISOCHI |
-
1978
- 1978-12-19 JP JP1978178021U patent/JPS5842441Y2/en not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5018454U (en) * | 1973-06-19 | 1975-02-28 | ||
JPS5018974A (en) * | 1973-06-22 | 1975-02-27 | ||
JPS5161782A (en) * | 1974-11-27 | 1976-05-28 | Hitachi Ltd | PATAANSAKUSEISOCHI |
Also Published As
Publication number | Publication date |
---|---|
JPS5842441Y2 (en) | 1983-09-26 |