JPS559064B2 - - Google Patents
Info
- Publication number
- JPS559064B2 JPS559064B2 JP7056872A JP7056872A JPS559064B2 JP S559064 B2 JPS559064 B2 JP S559064B2 JP 7056872 A JP7056872 A JP 7056872A JP 7056872 A JP7056872 A JP 7056872A JP S559064 B2 JPS559064 B2 JP S559064B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7056872A JPS559064B2 (en:Method) | 1972-07-14 | 1972-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7056872A JPS559064B2 (en:Method) | 1972-07-14 | 1972-07-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4929234A JPS4929234A (en:Method) | 1974-03-15 |
| JPS559064B2 true JPS559064B2 (en:Method) | 1980-03-07 |
Family
ID=13435267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7056872A Expired JPS559064B2 (en:Method) | 1972-07-14 | 1972-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS559064B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6332434U (en:Method) * | 1986-08-18 | 1988-03-02 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102533116B (zh) * | 2010-12-10 | 2015-06-17 | 安集微电子（上海）有限公司 | 一种化学机械抛光液 |
-
1972
- 1972-07-14 JP JP7056872A patent/JPS559064B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6332434U (en:Method) * | 1986-08-18 | 1988-03-02 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4929234A (en:Method) | 1974-03-15 |