JPS5588332U - - Google Patents
Info
- Publication number
- JPS5588332U JPS5588332U JP16679678U JP16679678U JPS5588332U JP S5588332 U JPS5588332 U JP S5588332U JP 16679678 U JP16679678 U JP 16679678U JP 16679678 U JP16679678 U JP 16679678U JP S5588332 U JPS5588332 U JP S5588332U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16679678U JPS605935Y2 (ja) | 1978-12-05 | 1978-12-05 | フィ−ドバ−移動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16679678U JPS605935Y2 (ja) | 1978-12-05 | 1978-12-05 | フィ−ドバ−移動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5588332U true JPS5588332U (enrdf_load_stackoverflow) | 1980-06-18 |
| JPS605935Y2 JPS605935Y2 (ja) | 1985-02-25 |
Family
ID=29166427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16679678U Expired JPS605935Y2 (ja) | 1978-12-05 | 1978-12-05 | フィ−ドバ−移動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS605935Y2 (enrdf_load_stackoverflow) |
Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6873087B1 (en) | 1999-10-29 | 2005-03-29 | Board Of Regents, The University Of Texas System | High precision orientation alignment and gap control stages for imprint lithography processes |
| US6871558B2 (en) | 2002-12-12 | 2005-03-29 | Molecular Imprints, Inc. | Method for determining characteristics of substrate employing fluid geometries |
| US6900881B2 (en) | 2002-07-11 | 2005-05-31 | Molecular Imprints, Inc. | Step and repeat imprint lithography systems |
| US6902853B2 (en) | 2000-07-16 | 2005-06-07 | Board Of Regents, The University Of Texas System | Dual wavelength method of determining a relative position of a substrate and a template |
| US6908861B2 (en) | 2002-07-11 | 2005-06-21 | Molecular Imprints, Inc. | Method for imprint lithography using an electric field |
| US6916584B2 (en) | 2002-08-01 | 2005-07-12 | Molecular Imprints, Inc. | Alignment methods for imprint lithography |
| US6926929B2 (en) | 2002-07-09 | 2005-08-09 | Molecular Imprints, Inc. | System and method for dispensing liquids |
| US6964793B2 (en) | 2002-05-16 | 2005-11-15 | Board Of Regents, The University Of Texas System | Method for fabricating nanoscale patterns in light curable compositions using an electric field |
| US6980282B2 (en) | 2002-12-11 | 2005-12-27 | Molecular Imprints, Inc. | Method for modulating shapes of substrates |
| US7019819B2 (en) | 2002-11-13 | 2006-03-28 | Molecular Imprints, Inc. | Chucking system for modulating shapes of substrates |
| US7027156B2 (en) | 2002-08-01 | 2006-04-11 | Molecular Imprints, Inc. | Scatterometry alignment for imprint lithography |
| US7060324B2 (en) | 2000-10-12 | 2006-06-13 | Board Of Regents, The University Of Texas System | Method of creating a dispersion of a liquid on a substrate |
| US7070405B2 (en) | 2002-08-01 | 2006-07-04 | Molecular Imprints, Inc. | Alignment systems for imprint lithography |
| US7071088B2 (en) | 2002-08-23 | 2006-07-04 | Molecular Imprints, Inc. | Method for fabricating bulbous-shaped vias |
| US7090716B2 (en) | 2003-10-02 | 2006-08-15 | Molecular Imprints, Inc. | Single phase fluid imprint lithography method |
| US7122079B2 (en) | 2004-02-27 | 2006-10-17 | Molecular Imprints, Inc. | Composition for an etching mask comprising a silicon-containing material |
| US7136150B2 (en) | 2003-09-25 | 2006-11-14 | Molecular Imprints, Inc. | Imprint lithography template having opaque alignment marks |
| US7157036B2 (en) | 2003-06-17 | 2007-01-02 | Molecular Imprints, Inc | Method to reduce adhesion between a conformable region and a pattern of a mold |
| US7179396B2 (en) | 2003-03-25 | 2007-02-20 | Molecular Imprints, Inc. | Positive tone bi-layer imprint lithography method |
| US7292326B2 (en) | 2004-11-30 | 2007-11-06 | Molecular Imprints, Inc. | Interferometric analysis for the manufacture of nano-scale devices |
| US7396475B2 (en) | 2003-04-25 | 2008-07-08 | Molecular Imprints, Inc. | Method of forming stepped structures employing imprint lithography |
| US7452574B2 (en) | 2003-02-27 | 2008-11-18 | Molecular Imprints, Inc. | Method to reduce adhesion between a polymerizable layer and a substrate employing a fluorine-containing layer |
| US7630067B2 (en) | 2004-11-30 | 2009-12-08 | Molecular Imprints, Inc. | Interferometric analysis method for the manufacture of nano-scale devices |
| US9223202B2 (en) | 2000-07-17 | 2015-12-29 | Board Of Regents, The University Of Texas System | Method of automatic fluid dispensing for imprint lithography processes |
-
1978
- 1978-12-05 JP JP16679678U patent/JPS605935Y2/ja not_active Expired
Cited By (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7098572B2 (en) | 1999-10-29 | 2006-08-29 | Board Of Regents, The University Of Texas System | Apparatus to control displacement of a body spaced-apart from a surface |
| US7060402B2 (en) | 1999-10-29 | 2006-06-13 | Board Of Regents, The University Of Texas System | Method of orientating a template with respect to a substrate in response to a force exerted on the template |
| US6873087B1 (en) | 1999-10-29 | 2005-03-29 | Board Of Regents, The University Of Texas System | High precision orientation alignment and gap control stages for imprint lithography processes |
| US6955868B2 (en) | 1999-10-29 | 2005-10-18 | Board Of Regents, The University Of Texas System | Method to control the relative position between a body and a surface |
| US6986975B2 (en) | 2000-07-16 | 2006-01-17 | Board Of Regents, The University Of Texas System | Method of aligning a template with a substrate employing moire patterns |
| US7303383B1 (en) | 2000-07-16 | 2007-12-04 | Board Of Regents, The University Of Texas System | Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marks |
| US6902853B2 (en) | 2000-07-16 | 2005-06-07 | Board Of Regents, The University Of Texas System | Dual wavelength method of determining a relative position of a substrate and a template |
| US6916585B2 (en) | 2000-07-16 | 2005-07-12 | Board Of Regents, The University Of Texas Systems | Method of varying template dimensions to achieve alignment during imprint lithography |
| US9223202B2 (en) | 2000-07-17 | 2015-12-29 | Board Of Regents, The University Of Texas System | Method of automatic fluid dispensing for imprint lithography processes |
| US7060324B2 (en) | 2000-10-12 | 2006-06-13 | Board Of Regents, The University Of Texas System | Method of creating a dispersion of a liquid on a substrate |
| US6964793B2 (en) | 2002-05-16 | 2005-11-15 | Board Of Regents, The University Of Texas System | Method for fabricating nanoscale patterns in light curable compositions using an electric field |
| US6926929B2 (en) | 2002-07-09 | 2005-08-09 | Molecular Imprints, Inc. | System and method for dispensing liquids |
| US6900881B2 (en) | 2002-07-11 | 2005-05-31 | Molecular Imprints, Inc. | Step and repeat imprint lithography systems |
| US6908861B2 (en) | 2002-07-11 | 2005-06-21 | Molecular Imprints, Inc. | Method for imprint lithography using an electric field |
| US7027156B2 (en) | 2002-08-01 | 2006-04-11 | Molecular Imprints, Inc. | Scatterometry alignment for imprint lithography |
| US6916584B2 (en) | 2002-08-01 | 2005-07-12 | Molecular Imprints, Inc. | Alignment methods for imprint lithography |
| US7070405B2 (en) | 2002-08-01 | 2006-07-04 | Molecular Imprints, Inc. | Alignment systems for imprint lithography |
| US7071088B2 (en) | 2002-08-23 | 2006-07-04 | Molecular Imprints, Inc. | Method for fabricating bulbous-shaped vias |
| US7019819B2 (en) | 2002-11-13 | 2006-03-28 | Molecular Imprints, Inc. | Chucking system for modulating shapes of substrates |
| US6980282B2 (en) | 2002-12-11 | 2005-12-27 | Molecular Imprints, Inc. | Method for modulating shapes of substrates |
| US6871558B2 (en) | 2002-12-12 | 2005-03-29 | Molecular Imprints, Inc. | Method for determining characteristics of substrate employing fluid geometries |
| US7452574B2 (en) | 2003-02-27 | 2008-11-18 | Molecular Imprints, Inc. | Method to reduce adhesion between a polymerizable layer and a substrate employing a fluorine-containing layer |
| US7179396B2 (en) | 2003-03-25 | 2007-02-20 | Molecular Imprints, Inc. | Positive tone bi-layer imprint lithography method |
| US7396475B2 (en) | 2003-04-25 | 2008-07-08 | Molecular Imprints, Inc. | Method of forming stepped structures employing imprint lithography |
| US7157036B2 (en) | 2003-06-17 | 2007-01-02 | Molecular Imprints, Inc | Method to reduce adhesion between a conformable region and a pattern of a mold |
| US7136150B2 (en) | 2003-09-25 | 2006-11-14 | Molecular Imprints, Inc. | Imprint lithography template having opaque alignment marks |
| US7090716B2 (en) | 2003-10-02 | 2006-08-15 | Molecular Imprints, Inc. | Single phase fluid imprint lithography method |
| US7122079B2 (en) | 2004-02-27 | 2006-10-17 | Molecular Imprints, Inc. | Composition for an etching mask comprising a silicon-containing material |
| US7630067B2 (en) | 2004-11-30 | 2009-12-08 | Molecular Imprints, Inc. | Interferometric analysis method for the manufacture of nano-scale devices |
| US7292326B2 (en) | 2004-11-30 | 2007-11-06 | Molecular Imprints, Inc. | Interferometric analysis for the manufacture of nano-scale devices |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS605935Y2 (ja) | 1985-02-25 |