JPS558682U - - Google Patents
Info
- Publication number
- JPS558682U JPS558682U JP9199278U JP9199278U JPS558682U JP S558682 U JPS558682 U JP S558682U JP 9199278 U JP9199278 U JP 9199278U JP 9199278 U JP9199278 U JP 9199278U JP S558682 U JPS558682 U JP S558682U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9199278U JPS558682U (en) | 1978-07-03 | 1978-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9199278U JPS558682U (en) | 1978-07-03 | 1978-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS558682U true JPS558682U (en) | 1980-01-21 |
Family
ID=29021765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9199278U Pending JPS558682U (en) | 1978-07-03 | 1978-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS558682U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50110283A (en) * | 1974-02-06 | 1975-08-30 | ||
| JPS5216482A (en) * | 1975-07-30 | 1977-02-07 | Toshiba Corp | Surface treatment apparatus using activated gas |
-
1978
- 1978-07-03 JP JP9199278U patent/JPS558682U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50110283A (en) * | 1974-02-06 | 1975-08-30 | ||
| JPS5216482A (en) * | 1975-07-30 | 1977-02-07 | Toshiba Corp | Surface treatment apparatus using activated gas |