JPS5586471U - - Google Patents
Info
- Publication number
- JPS5586471U JPS5586471U JP17126878U JP17126878U JPS5586471U JP S5586471 U JPS5586471 U JP S5586471U JP 17126878 U JP17126878 U JP 17126878U JP 17126878 U JP17126878 U JP 17126878U JP S5586471 U JPS5586471 U JP S5586471U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17126878U JPS5626539Y2 (ja) | 1978-12-12 | 1978-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17126878U JPS5626539Y2 (ja) | 1978-12-12 | 1978-12-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5586471U true JPS5586471U (ja) | 1980-06-14 |
| JPS5626539Y2 JPS5626539Y2 (ja) | 1981-06-24 |
Family
ID=29175008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17126878U Expired JPS5626539Y2 (ja) | 1978-12-12 | 1978-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5626539Y2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1695369A4 (en) | 2003-12-12 | 2009-11-04 | Semequip Inc | METHOD AND DEVICE FOR EXTENDING DEVICE TERMINATION IN ION IMPLANTATION |
-
1978
- 1978-12-12 JP JP17126878U patent/JPS5626539Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5626539Y2 (ja) | 1981-06-24 |