JPS5586058A - Method of and device for minimizing surface pollution - Google Patents

Method of and device for minimizing surface pollution

Info

Publication number
JPS5586058A
JPS5586058A JP6551979A JP6551979A JPS5586058A JP S5586058 A JPS5586058 A JP S5586058A JP 6551979 A JP6551979 A JP 6551979A JP 6551979 A JP6551979 A JP 6551979A JP S5586058 A JPS5586058 A JP S5586058A
Authority
JP
Japan
Prior art keywords
surface pollution
minimizing surface
minimizing
pollution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6551979A
Other languages
Japanese (ja)
Inventor
Seodoaa Fuurii Yakobusu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
South African Inventions Development Corp
Original Assignee
South African Inventions Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by South African Inventions Development Corp filed Critical South African Inventions Development Corp
Publication of JPS5586058A publication Critical patent/JPS5586058A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP6551979A 1978-12-20 1979-05-26 Method of and device for minimizing surface pollution Pending JPS5586058A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ZA787151A ZA787151B (en) 1978-12-20 1978-12-20 The minimisation of surface originating contamination in electron microscopes

Publications (1)

Publication Number Publication Date
JPS5586058A true JPS5586058A (en) 1980-06-28

Family

ID=25573790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6551979A Pending JPS5586058A (en) 1978-12-20 1979-05-26 Method of and device for minimizing surface pollution

Country Status (3)

Country Link
JP (1) JPS5586058A (en)
GB (1) GB2038544A (en)
ZA (1) ZA787151B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018194539A (en) * 2017-02-06 2018-12-06 Ｊｆｅスチール株式会社 Deposit particle size distribution evaluation method, and manufacturing method of steel plate

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7906633A (en) * 1979-09-05 1981-03-09 Philips Nv ANTI-CONTAMINATION DIAPHRAGM FOR ELECTRON RADIUS.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018194539A (en) * 2017-02-06 2018-12-06 Ｊｆｅスチール株式会社 Deposit particle size distribution evaluation method, and manufacturing method of steel plate

Also Published As

Publication number Publication date
GB2038544A (en) 1980-07-23
ZA787151B (en) 1980-08-27

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