JPS558591B2 - - Google Patents
Info
- Publication number
- JPS558591B2 JPS558591B2 JP7767174A JP7767174A JPS558591B2 JP S558591 B2 JPS558591 B2 JP S558591B2 JP 7767174 A JP7767174 A JP 7767174A JP 7767174 A JP7767174 A JP 7767174A JP S558591 B2 JPS558591 B2 JP S558591B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49077671A JPS516660A (en) | 1974-07-05 | 1974-07-05 | Genzo oyobi etsuchinguhoshiki |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49077671A JPS516660A (en) | 1974-07-05 | 1974-07-05 | Genzo oyobi etsuchinguhoshiki |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS516660A JPS516660A (en) | 1976-01-20 |
| JPS558591B2 true JPS558591B2 (ja) | 1980-03-05 |
Family
ID=13640334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49077671A Granted JPS516660A (en) | 1974-07-05 | 1974-07-05 | Genzo oyobi etsuchinguhoshiki |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS516660A (ja) |
-
1974
- 1974-07-05 JP JP49077671A patent/JPS516660A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS516660A (en) | 1976-01-20 |