JPS557673B2 - - Google Patents

Info

Publication number
JPS557673B2
JPS557673B2 JP11831072A JP11831072A JPS557673B2 JP S557673 B2 JPS557673 B2 JP S557673B2 JP 11831072 A JP11831072 A JP 11831072A JP 11831072 A JP11831072 A JP 11831072A JP S557673 B2 JPS557673 B2 JP S557673B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11831072A
Other languages
Japanese (ja)
Other versions
JPS4976094A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11831072A priority Critical patent/JPS557673B2/ja
Publication of JPS4976094A publication Critical patent/JPS4976094A/ja
Publication of JPS557673B2 publication Critical patent/JPS557673B2/ja
Expired legal-status Critical Current

Links

JP11831072A 1972-11-25 1972-11-25 Expired JPS557673B2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11831072A JPS557673B2 (zh) 1972-11-25 1972-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11831072A JPS557673B2 (zh) 1972-11-25 1972-11-25

Publications (2)

Publication Number Publication Date
JPS4976094A JPS4976094A (zh) 1974-07-23
JPS557673B2 true JPS557673B2 (zh) 1980-02-27

Family

ID=14733500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11831072A Expired JPS557673B2 (zh) 1972-11-25 1972-11-25

Country Status (1)

Country Link
JP (1) JPS557673B2 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117005U (ja) * 1984-01-17 1985-08-07 斎藤　守 Ｒ切削バイト
JPS6221371Y2 (zh) * 1983-07-30 1987-05-30

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI385414B (zh) 2003-11-20 2013-02-11 尼康股份有限公司 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6221371Y2 (zh) * 1983-07-30 1987-05-30
JPS60117005U (ja) * 1984-01-17 1985-08-07 斎藤　守 Ｒ切削バイト

Also Published As

Publication number Publication date
JPS4976094A (zh) 1974-07-23

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