JPS557646U - - Google Patents
Info
- Publication number
- JPS557646U JPS557646U JP8855178U JP8855178U JPS557646U JP S557646 U JPS557646 U JP S557646U JP 8855178 U JP8855178 U JP 8855178U JP 8855178 U JP8855178 U JP 8855178U JP S557646 U JPS557646 U JP S557646U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8855178U JPS557646U (nl) | 1978-06-29 | 1978-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8855178U JPS557646U (nl) | 1978-06-29 | 1978-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS557646U true JPS557646U (nl) | 1980-01-18 |
Family
ID=29015131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8855178U Pending JPS557646U (nl) | 1978-06-29 | 1978-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS557646U (nl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57202734A (en) * | 1981-06-09 | 1982-12-11 | Matsushita Electric Ind Co Ltd | Method and device for manufacturing of semiconductor |
-
1978
- 1978-06-29 JP JP8855178U patent/JPS557646U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57202734A (en) * | 1981-06-09 | 1982-12-11 | Matsushita Electric Ind Co Ltd | Method and device for manufacturing of semiconductor |
| JPH0423416B2 (nl) * | 1981-06-09 | 1992-04-22 | Matsushita Electric Ind Co Ltd |