JPS557555Y2 - - Google Patents
Info
- Publication number
- JPS557555Y2 JPS557555Y2 JP1976024712U JP2471276U JPS557555Y2 JP S557555 Y2 JPS557555 Y2 JP S557555Y2 JP 1976024712 U JP1976024712 U JP 1976024712U JP 2471276 U JP2471276 U JP 2471276U JP S557555 Y2 JPS557555 Y2 JP S557555Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976024712U JPS557555Y2 (en:Method) | 1976-03-02 | 1976-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976024712U JPS557555Y2 (en:Method) | 1976-03-02 | 1976-03-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52117548U JPS52117548U (en:Method) | 1977-09-06 |
| JPS557555Y2 true JPS557555Y2 (en:Method) | 1980-02-20 |
Family
ID=28484583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976024712U Expired JPS557555Y2 (en:Method) | 1976-03-02 | 1976-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS557555Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5803488B2 (ja) * | 2011-09-22 | 2015-11-04 | 凸版印刷株式会社 | 原子層堆積法によるフレキシブル基板への成膜方法及び成膜装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4960046U (en:Method) * | 1972-09-08 | 1974-05-27 | ||
| JPS4974674A (en:Method) * | 1972-11-10 | 1974-07-18 | ||
| US3878085A (en) * | 1973-07-05 | 1975-04-15 | Sloan Technology Corp | Cathode sputtering apparatus |
| US4166018A (en) * | 1974-01-31 | 1979-08-28 | Airco, Inc. | Sputtering process and apparatus |
-
1976
- 1976-03-02 JP JP1976024712U patent/JPS557555Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52117548U (en:Method) | 1977-09-06 |