JPS557555Y2 - - Google Patents

Info

Publication number
JPS557555Y2
JPS557555Y2 JP1976024712U JP2471276U JPS557555Y2 JP S557555 Y2 JPS557555 Y2 JP S557555Y2 JP 1976024712 U JP1976024712 U JP 1976024712U JP 2471276 U JP2471276 U JP 2471276U JP S557555 Y2 JPS557555 Y2 JP S557555Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976024712U
Other languages
Japanese (ja)
Other versions
JPS52117548U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976024712U priority Critical patent/JPS557555Y2/ja
Publication of JPS52117548U publication Critical patent/JPS52117548U/ja
Application granted granted Critical
Publication of JPS557555Y2 publication Critical patent/JPS557555Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1976024712U 1976-03-02 1976-03-02 Expired JPS557555Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976024712U JPS557555Y2 (enrdf_load_stackoverflow) 1976-03-02 1976-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976024712U JPS557555Y2 (enrdf_load_stackoverflow) 1976-03-02 1976-03-02

Publications (2)

Publication Number Publication Date
JPS52117548U JPS52117548U (enrdf_load_stackoverflow) 1977-09-06
JPS557555Y2 true JPS557555Y2 (enrdf_load_stackoverflow) 1980-02-20

Family

ID=28484583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976024712U Expired JPS557555Y2 (enrdf_load_stackoverflow) 1976-03-02 1976-03-02

Country Status (1)

Country Link
JP (1) JPS557555Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5803488B2 (ja) * 2011-09-22 2015-11-04 凸版印刷株式会社 原子層堆積法によるフレキシブル基板への成膜方法及び成膜装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960046U (enrdf_load_stackoverflow) * 1972-09-08 1974-05-27
JPS4974674A (enrdf_load_stackoverflow) * 1972-11-10 1974-07-18
US3878085A (en) * 1973-07-05 1975-04-15 Sloan Technology Corp Cathode sputtering apparatus
US4166018A (en) * 1974-01-31 1979-08-28 Airco, Inc. Sputtering process and apparatus

Also Published As

Publication number Publication date
JPS52117548U (enrdf_load_stackoverflow) 1977-09-06

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