JPS557554Y2 - - Google Patents
Info
- Publication number
- JPS557554Y2 JPS557554Y2 JP1975148674U JP14867475U JPS557554Y2 JP S557554 Y2 JPS557554 Y2 JP S557554Y2 JP 1975148674 U JP1975148674 U JP 1975148674U JP 14867475 U JP14867475 U JP 14867475U JP S557554 Y2 JPS557554 Y2 JP S557554Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975148674U JPS557554Y2 (en:Method) | 1975-10-31 | 1975-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975148674U JPS557554Y2 (en:Method) | 1975-10-31 | 1975-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5262344U JPS5262344U (en:Method) | 1977-05-09 |
| JPS557554Y2 true JPS557554Y2 (en:Method) | 1980-02-20 |
Family
ID=28628208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975148674U Expired JPS557554Y2 (en:Method) | 1975-10-31 | 1975-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS557554Y2 (en:Method) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3878085A (en) * | 1973-07-05 | 1975-04-15 | Sloan Technology Corp | Cathode sputtering apparatus |
-
1975
- 1975-10-31 JP JP1975148674U patent/JPS557554Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5262344U (en:Method) | 1977-05-09 |