JPS557554Y2 - - Google Patents

Info

Publication number
JPS557554Y2
JPS557554Y2 JP1975148674U JP14867475U JPS557554Y2 JP S557554 Y2 JPS557554 Y2 JP S557554Y2 JP 1975148674 U JP1975148674 U JP 1975148674U JP 14867475 U JP14867475 U JP 14867475U JP S557554 Y2 JPS557554 Y2 JP S557554Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975148674U
Other languages
Japanese (ja)
Other versions
JPS5262344U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975148674U priority Critical patent/JPS557554Y2/ja
Publication of JPS5262344U publication Critical patent/JPS5262344U/ja
Application granted granted Critical
Publication of JPS557554Y2 publication Critical patent/JPS557554Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1975148674U 1975-10-31 1975-10-31 Expired JPS557554Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975148674U JPS557554Y2 (enrdf_load_stackoverflow) 1975-10-31 1975-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975148674U JPS557554Y2 (enrdf_load_stackoverflow) 1975-10-31 1975-10-31

Publications (2)

Publication Number Publication Date
JPS5262344U JPS5262344U (enrdf_load_stackoverflow) 1977-05-09
JPS557554Y2 true JPS557554Y2 (enrdf_load_stackoverflow) 1980-02-20

Family

ID=28628208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975148674U Expired JPS557554Y2 (enrdf_load_stackoverflow) 1975-10-31 1975-10-31

Country Status (1)

Country Link
JP (1) JPS557554Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3878085A (en) * 1973-07-05 1975-04-15 Sloan Technology Corp Cathode sputtering apparatus

Also Published As

Publication number Publication date
JPS5262344U (enrdf_load_stackoverflow) 1977-05-09

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