JPS5575290A - Etching process - Google Patents

Etching process

Info

Publication number
JPS5575290A
JPS5575290A JP14899778A JP14899778A JPS5575290A JP S5575290 A JPS5575290 A JP S5575290A JP 14899778 A JP14899778 A JP 14899778A JP 14899778 A JP14899778 A JP 14899778A JP S5575290 A JPS5575290 A JP S5575290A
Authority
JP
Japan
Prior art keywords
etching process
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14899778A
Other languages
English (en)
Other versions
JPS5826838B2 (ja
Inventor
Shigeru Tomizawa
Takayoshi Hanabusa
Tsunemi Ooba
Hiroshi Isozuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP53148997A priority Critical patent/JPS5826838B2/ja
Publication of JPS5575290A publication Critical patent/JPS5575290A/ja
Publication of JPS5826838B2 publication Critical patent/JPS5826838B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP53148997A 1978-12-04 1978-12-04 エッチング方法 Expired JPS5826838B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53148997A JPS5826838B2 (ja) 1978-12-04 1978-12-04 エッチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53148997A JPS5826838B2 (ja) 1978-12-04 1978-12-04 エッチング方法

Publications (2)

Publication Number Publication Date
JPS5575290A true JPS5575290A (en) 1980-06-06
JPS5826838B2 JPS5826838B2 (ja) 1983-06-06

Family

ID=15465387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53148997A Expired JPS5826838B2 (ja) 1978-12-04 1978-12-04 エッチング方法

Country Status (1)

Country Link
JP (1) JPS5826838B2 (ja)

Also Published As

Publication number Publication date
JPS5826838B2 (ja) 1983-06-06

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