JPS5573051A - Pattern drawing apparatus - Google Patents

Pattern drawing apparatus

Info

Publication number
JPS5573051A
JPS5573051A JP14531278A JP14531278A JPS5573051A JP S5573051 A JPS5573051 A JP S5573051A JP 14531278 A JP14531278 A JP 14531278A JP 14531278 A JP14531278 A JP 14531278A JP S5573051 A JPS5573051 A JP S5573051A
Authority
JP
Japan
Prior art keywords
sinθ
cosθ
register
coordinates
counter circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14531278A
Other languages
Japanese (ja)
Inventor
Yutaka Hitai
Nobuo Okuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14531278A priority Critical patent/JPS5573051A/en
Priority to US06/053,215 priority patent/US4280186A/en
Priority to DE2927413A priority patent/DE2927413C2/en
Publication of JPS5573051A publication Critical patent/JPS5573051A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Digital Computer Display Output (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To readily draw rectangles by giving the coordinates of origin, longitudinal and transversal lengths and the angles of inclination from horizon as pattern information and drawing the horizons connecting between the coordinates with respect to the apparatus of drawing rectangles of arbitrary angles on a pattern memory.
CONSTITUTION: Origin coordinates are set in counter circuits 408, 418, 428, 438 to initiate these, after which selection circuits 402, 412 are set to the respective longitudinal length l(register 401) side and transversal length m (register 411) side and the l, m are respectively set in counter circuits 403, 413. At the same time, the selection circuits 406, 436 and 416, 426 are set respectively to the cosθ (register 415) side and sinθ (register 405) side to add cosθ, sinθ, sinθ, cosθ respectively to rate multis 407, 417, 427, 437 and the counter circuits 408, 418, 428, 438 are respectively set to UP, UP, DOWn, UP, thence the clock pulses proportional to sinθ, cosθ are generated in a control circuit 400 by way of a change detecting circuit 409 and these are counted by the counter circuits.
COPYRIGHT: (C)1980,JPO&Japio
JP14531278A 1978-07-07 1978-11-27 Pattern drawing apparatus Pending JPS5573051A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP14531278A JPS5573051A (en) 1978-11-27 1978-11-27 Pattern drawing apparatus
US06/053,215 US4280186A (en) 1978-07-07 1979-06-29 Exposure apparatus using electron beams
DE2927413A DE2927413C2 (en) 1978-07-07 1979-07-06 Electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14531278A JPS5573051A (en) 1978-11-27 1978-11-27 Pattern drawing apparatus

Publications (1)

Publication Number Publication Date
JPS5573051A true JPS5573051A (en) 1980-06-02

Family

ID=15382235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14531278A Pending JPS5573051A (en) 1978-07-07 1978-11-27 Pattern drawing apparatus

Country Status (1)

Country Link
JP (1) JPS5573051A (en)

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