JPS5569370U - - Google Patents
Info
- Publication number
- JPS5569370U JPS5569370U JP15290178U JP15290178U JPS5569370U JP S5569370 U JPS5569370 U JP S5569370U JP 15290178 U JP15290178 U JP 15290178U JP 15290178 U JP15290178 U JP 15290178U JP S5569370 U JPS5569370 U JP S5569370U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15290178U JPS5569370U (enExample) | 1978-11-08 | 1978-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15290178U JPS5569370U (enExample) | 1978-11-08 | 1978-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5569370U true JPS5569370U (enExample) | 1980-05-13 |
Family
ID=29139561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15290178U Pending JPS5569370U (enExample) | 1978-11-08 | 1978-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5569370U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57130358A (en) * | 1981-02-05 | 1982-08-12 | Nippon Telegr & Teleph Corp <Ntt> | Full automatic ion implantation device |
| JPS62237655A (ja) * | 1986-04-08 | 1987-10-17 | Nissin Electric Co Ltd | イオン注入装置 |
-
1978
- 1978-11-08 JP JP15290178U patent/JPS5569370U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57130358A (en) * | 1981-02-05 | 1982-08-12 | Nippon Telegr & Teleph Corp <Ntt> | Full automatic ion implantation device |
| JPS62237655A (ja) * | 1986-04-08 | 1987-10-17 | Nissin Electric Co Ltd | イオン注入装置 |