JPS5568355U - - Google Patents
Info
- Publication number
- JPS5568355U JPS5568355U JP15147578U JP15147578U JPS5568355U JP S5568355 U JPS5568355 U JP S5568355U JP 15147578 U JP15147578 U JP 15147578U JP 15147578 U JP15147578 U JP 15147578U JP S5568355 U JPS5568355 U JP S5568355U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15147578U JPS5915080Y2 (en) | 1978-11-02 | 1978-11-02 | semiconductor equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15147578U JPS5915080Y2 (en) | 1978-11-02 | 1978-11-02 | semiconductor equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5568355U true JPS5568355U (en) | 1980-05-10 |
JPS5915080Y2 JPS5915080Y2 (en) | 1984-05-04 |
Family
ID=29136764
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15147578U Expired JPS5915080Y2 (en) | 1978-11-02 | 1978-11-02 | semiconductor equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5915080Y2 (en) |
-
1978
- 1978-11-02 JP JP15147578U patent/JPS5915080Y2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5915080Y2 (en) | 1984-05-04 |