JPS5568341U - - Google Patents
Info
- Publication number
- JPS5568341U JPS5568341U JP15182678U JP15182678U JPS5568341U JP S5568341 U JPS5568341 U JP S5568341U JP 15182678 U JP15182678 U JP 15182678U JP 15182678 U JP15182678 U JP 15182678U JP S5568341 U JPS5568341 U JP S5568341U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15182678U JPS5568341U (ja) | 1978-11-06 | 1978-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15182678U JPS5568341U (ja) | 1978-11-06 | 1978-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5568341U true JPS5568341U (ja) | 1980-05-10 |
Family
ID=29137471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15182678U Pending JPS5568341U (ja) | 1978-11-06 | 1978-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5568341U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62159418A (ja) * | 1986-01-07 | 1987-07-15 | Fujitsu Ltd | 気相成長装置 |
| JPH08162423A (ja) * | 1994-11-30 | 1996-06-21 | Shinetsu Quartz Prod Co Ltd | 枚葉式ウエーハ熱処理装置とその装置に用いる反応容器の製造方法 |
-
1978
- 1978-11-06 JP JP15182678U patent/JPS5568341U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62159418A (ja) * | 1986-01-07 | 1987-07-15 | Fujitsu Ltd | 気相成長装置 |
| JPH08162423A (ja) * | 1994-11-30 | 1996-06-21 | Shinetsu Quartz Prod Co Ltd | 枚葉式ウエーハ熱処理装置とその装置に用いる反応容器の製造方法 |