JPS5568194A - Preparation of electron beam gun for working material - Google Patents

Preparation of electron beam gun for working material

Info

Publication number
JPS5568194A
JPS5568194A JP14452279A JP14452279A JPS5568194A JP S5568194 A JPS5568194 A JP S5568194A JP 14452279 A JP14452279 A JP 14452279A JP 14452279 A JP14452279 A JP 14452279A JP S5568194 A JPS5568194 A JP S5568194A
Authority
JP
Japan
Prior art keywords
preparation
electron beam
working material
beam gun
gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14452279A
Other languages
Japanese (ja)
Inventor
Baisubuengaa Jiikufuriito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Ing Rudolf Hell GmbH
Original Assignee
Dr Ing Rudolf Hell GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Ing Rudolf Hell GmbH filed Critical Dr Ing Rudolf Hell GmbH
Publication of JPS5568194A publication Critical patent/JPS5568194A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301—Arrangements enabling beams to pass between regions of different pressure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
JP14452279A 1978-11-09 1979-11-09 Preparation of electron beam gun for working material Pending JPS5568194A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19782848626 DE2848626A1 (en) 1978-11-09 1978-11-09 METHOD FOR PREPARING AN ELECTRON BEAM CANNON

Publications (1)

Publication Number Publication Date
JPS5568194A true JPS5568194A (en) 1980-05-22

Family

ID=6054250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14452279A Pending JPS5568194A (en) 1978-11-09 1979-11-09 Preparation of electron beam gun for working material

Country Status (6)

Country Link
JP (1) JPS5568194A (en)
DD (1) DD147436A5 (en)
DE (1) DE2848626A1 (en)
FR (1) FR2441268A1 (en)
GB (1) GB2038084A (en)
NL (1) NL7908188A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015222616A (en) * 2014-05-22 2015-12-10 Ｎｅｃエンジニアリング株式会社 Electron beam device, and device and method for manufacturing filament for electron beam
JP2018085351A (en) * 2018-02-08 2018-05-31 Ｎｅｃプラットフォームズ株式会社 Electron beam device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3020809A1 (en) * 1980-06-02 1981-12-10 M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München METHOD FOR PRODUCING AN ELECTRON BEAM LEFT WINDOW

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015222616A (en) * 2014-05-22 2015-12-10 Ｎｅｃエンジニアリング株式会社 Electron beam device, and device and method for manufacturing filament for electron beam
JP2018085351A (en) * 2018-02-08 2018-05-31 Ｎｅｃプラットフォームズ株式会社 Electron beam device

Also Published As

Publication number Publication date
DD147436A5 (en) 1981-04-01
NL7908188A (en) 1980-05-13
FR2441268A1 (en) 1980-06-06
GB2038084A (en) 1980-07-16
DE2848626A1 (en) 1980-05-14

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