JPS5565402A - Method of manufacturing thin film resistor - Google Patents

Method of manufacturing thin film resistor

Info

Publication number
JPS5565402A
JPS5565402A JP13827678A JP13827678A JPS5565402A JP S5565402 A JPS5565402 A JP S5565402A JP 13827678 A JP13827678 A JP 13827678A JP 13827678 A JP13827678 A JP 13827678A JP S5565402 A JPS5565402 A JP S5565402A
Authority
JP
Japan
Prior art keywords
thin film
film resistor
manufacturing thin
manufacturing
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13827678A
Other languages
Japanese (ja)
Inventor
Tsuneaki Uema
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gen Co Ltd
Original Assignee
Gen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Co Ltd filed Critical Gen Co Ltd
Priority to JP13827678A priority Critical patent/JPS5565402A/en
Publication of JPS5565402A publication Critical patent/JPS5565402A/en
Pending legal-status Critical Current

Links

JP13827678A 1978-11-09 1978-11-09 Method of manufacturing thin film resistor Pending JPS5565402A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13827678A JPS5565402A (en) 1978-11-09 1978-11-09 Method of manufacturing thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13827678A JPS5565402A (en) 1978-11-09 1978-11-09 Method of manufacturing thin film resistor

Publications (1)

Publication Number Publication Date
JPS5565402A true JPS5565402A (en) 1980-05-16

Family

ID=15218121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13827678A Pending JPS5565402A (en) 1978-11-09 1978-11-09 Method of manufacturing thin film resistor

Country Status (1)

Country Link
JP (1) JPS5565402A (en)

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