JPS5561820A - Impedance automatic matching unit in high frequency gas discharge - Google Patents
Impedance automatic matching unit in high frequency gas dischargeInfo
- Publication number
- JPS5561820A JPS5561820A JP13319978A JP13319978A JPS5561820A JP S5561820 A JPS5561820 A JP S5561820A JP 13319978 A JP13319978 A JP 13319978A JP 13319978 A JP13319978 A JP 13319978A JP S5561820 A JPS5561820 A JP S5561820A
- Authority
- JP
- Japan
- Prior art keywords
- high frequency
- tuning
- gas discharge
- output
- detected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To automatically match the impedance of high frequency gas discharge with that of high frequency power supply.
CONSTITUTION: The output C4 is detected at D for the terminal Q of the turning circuit and high frequency components are taken off at C5 and it is amplified 37. This pulsive waveform and the pulse from the oscillator 36 are in phase detection 38 and the phase and amplitude are detected. The output is in proportion to the pulse amplitude detected at D and the polarity is the degree of tuning at the matching circuit 31A. The output of the detector 38 is amplified 35 and fed to the magnetizing coil 34. The permeability of the magnetic substance 33 is changed, the inductance of the tuning coil 32 is changed, and when the tuning frequency is set for the phase relation so that is closes to the frequency from the high frequency power supply 11, the state of tuning to the high frequency can be kept at all times.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13319978A JPS5561820A (en) | 1978-10-31 | 1978-10-31 | Impedance automatic matching unit in high frequency gas discharge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13319978A JPS5561820A (en) | 1978-10-31 | 1978-10-31 | Impedance automatic matching unit in high frequency gas discharge |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5561820A true JPS5561820A (en) | 1980-05-09 |
Family
ID=15099031
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13319978A Pending JPS5561820A (en) | 1978-10-31 | 1978-10-31 | Impedance automatic matching unit in high frequency gas discharge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5561820A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60256819A (en) * | 1984-06-04 | 1985-12-18 | Ulvac Corp | Rf electric power supply controller for plasma utilizing device |
-
1978
- 1978-10-31 JP JP13319978A patent/JPS5561820A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60256819A (en) * | 1984-06-04 | 1985-12-18 | Ulvac Corp | Rf electric power supply controller for plasma utilizing device |
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