JPS5561820A - Impedance automatic matching unit in high frequency gas discharge - Google Patents

Impedance automatic matching unit in high frequency gas discharge

Info

Publication number
JPS5561820A
JPS5561820A JP13319978A JP13319978A JPS5561820A JP S5561820 A JPS5561820 A JP S5561820A JP 13319978 A JP13319978 A JP 13319978A JP 13319978 A JP13319978 A JP 13319978A JP S5561820 A JPS5561820 A JP S5561820A
Authority
JP
Japan
Prior art keywords
high frequency
tuning
gas discharge
output
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13319978A
Other languages
Japanese (ja)
Inventor
Hidefumi Funaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP13319978A priority Critical patent/JPS5561820A/en
Publication of JPS5561820A publication Critical patent/JPS5561820A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To automatically match the impedance of high frequency gas discharge with that of high frequency power supply.
CONSTITUTION: The output C4 is detected at D for the terminal Q of the turning circuit and high frequency components are taken off at C5 and it is amplified 37. This pulsive waveform and the pulse from the oscillator 36 are in phase detection 38 and the phase and amplitude are detected. The output is in proportion to the pulse amplitude detected at D and the polarity is the degree of tuning at the matching circuit 31A. The output of the detector 38 is amplified 35 and fed to the magnetizing coil 34. The permeability of the magnetic substance 33 is changed, the inductance of the tuning coil 32 is changed, and when the tuning frequency is set for the phase relation so that is closes to the frequency from the high frequency power supply 11, the state of tuning to the high frequency can be kept at all times.
COPYRIGHT: (C)1980,JPO&Japio
JP13319978A 1978-10-31 1978-10-31 Impedance automatic matching unit in high frequency gas discharge Pending JPS5561820A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13319978A JPS5561820A (en) 1978-10-31 1978-10-31 Impedance automatic matching unit in high frequency gas discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13319978A JPS5561820A (en) 1978-10-31 1978-10-31 Impedance automatic matching unit in high frequency gas discharge

Publications (1)

Publication Number Publication Date
JPS5561820A true JPS5561820A (en) 1980-05-09

Family

ID=15099031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13319978A Pending JPS5561820A (en) 1978-10-31 1978-10-31 Impedance automatic matching unit in high frequency gas discharge

Country Status (1)

Country Link
JP (1) JPS5561820A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60256819A (en) * 1984-06-04 1985-12-18 Ulvac Corp Rf electric power supply controller for plasma utilizing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60256819A (en) * 1984-06-04 1985-12-18 Ulvac Corp Rf electric power supply controller for plasma utilizing device

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