JPS5558368A - Method of cooling inductionnheated evaporation apparatus and cooling device therefor - Google Patents

Method of cooling inductionnheated evaporation apparatus and cooling device therefor

Info

Publication number
JPS5558368A
JPS5558368A JP13601579A JP13601579A JPS5558368A JP S5558368 A JPS5558368 A JP S5558368A JP 13601579 A JP13601579 A JP 13601579A JP 13601579 A JP13601579 A JP 13601579A JP S5558368 A JPS5558368 A JP S5558368A
Authority
JP
Japan
Prior art keywords
cooling
inductionnheated
device therefor
evaporation apparatus
cooling device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13601579A
Other languages
Japanese (ja)
Other versions
JPS599623B2 (en
Inventor
Hiru Roorensu
Gaabisu Denisu
Heraa Robaato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arris Technology Inc
Original Assignee
Arris Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arris Technology Inc filed Critical Arris Technology Inc
Publication of JPS5558368A publication Critical patent/JPS5558368A/en
Publication of JPS599623B2 publication Critical patent/JPS599623B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP13601579A 1978-10-23 1979-10-23 Method for cooling induction heated vapor deposition equipment and cooling device therefor Expired JPS599623B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US95357578A 1978-10-23 1978-10-23
US000000953575 1978-10-23

Publications (2)

Publication Number Publication Date
JPS5558368A true JPS5558368A (en) 1980-05-01
JPS599623B2 JPS599623B2 (en) 1984-03-03

Family

ID=25494207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13601579A Expired JPS599623B2 (en) 1978-10-23 1979-10-23 Method for cooling induction heated vapor deposition equipment and cooling device therefor

Country Status (1)

Country Link
JP (1) JPS599623B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024377A (en) * 1983-07-21 1985-02-07 Canon Inc Method and device for producing deposited film
JP2008514819A (en) * 2004-10-01 2008-05-08 エルピーイー ソシエタ ペル アチオニ Epitaxial reactor cooling method and reactor cooled thereby

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02134009A (en) * 1988-11-14 1990-05-23 Toyo Commun Equip Co Ltd Structure of piezoelectric device package
JPH0728733Y2 (en) * 1990-01-10 1995-06-28 セイコー電子部品株式会社 Surface mount piezoelectric vibrator container
JPH0923131A (en) * 1995-07-07 1997-01-21 Murata Mfg Co Ltd Piezo-electric resonance component

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024377A (en) * 1983-07-21 1985-02-07 Canon Inc Method and device for producing deposited film
JP2008514819A (en) * 2004-10-01 2008-05-08 エルピーイー ソシエタ ペル アチオニ Epitaxial reactor cooling method and reactor cooled thereby

Also Published As

Publication number Publication date
JPS599623B2 (en) 1984-03-03

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