JPS5558368A - Method of cooling inductionnheated evaporation apparatus and cooling device therefor - Google Patents
Method of cooling inductionnheated evaporation apparatus and cooling device thereforInfo
- Publication number
- JPS5558368A JPS5558368A JP13601579A JP13601579A JPS5558368A JP S5558368 A JPS5558368 A JP S5558368A JP 13601579 A JP13601579 A JP 13601579A JP 13601579 A JP13601579 A JP 13601579A JP S5558368 A JPS5558368 A JP S5558368A
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- inductionnheated
- device therefor
- evaporation apparatus
- cooling device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US95357578A | 1978-10-23 | 1978-10-23 | |
US000000953575 | 1978-10-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5558368A true JPS5558368A (en) | 1980-05-01 |
JPS599623B2 JPS599623B2 (en) | 1984-03-03 |
Family
ID=25494207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13601579A Expired JPS599623B2 (en) | 1978-10-23 | 1979-10-23 | Method for cooling induction heated vapor deposition equipment and cooling device therefor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS599623B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6024377A (en) * | 1983-07-21 | 1985-02-07 | Canon Inc | Method and device for producing deposited film |
JP2008514819A (en) * | 2004-10-01 | 2008-05-08 | エルピーイー ソシエタ ペル アチオニ | Epitaxial reactor cooling method and reactor cooled thereby |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02134009A (en) * | 1988-11-14 | 1990-05-23 | Toyo Commun Equip Co Ltd | Structure of piezoelectric device package |
JPH0728733Y2 (en) * | 1990-01-10 | 1995-06-28 | セイコー電子部品株式会社 | Surface mount piezoelectric vibrator container |
JPH0923131A (en) * | 1995-07-07 | 1997-01-21 | Murata Mfg Co Ltd | Piezo-electric resonance component |
-
1979
- 1979-10-23 JP JP13601579A patent/JPS599623B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6024377A (en) * | 1983-07-21 | 1985-02-07 | Canon Inc | Method and device for producing deposited film |
JP2008514819A (en) * | 2004-10-01 | 2008-05-08 | エルピーイー ソシエタ ペル アチオニ | Epitaxial reactor cooling method and reactor cooled thereby |
Also Published As
Publication number | Publication date |
---|---|
JPS599623B2 (en) | 1984-03-03 |
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