Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KKfiledCriticalJeol Ltd
Priority to JP53130632ApriorityCriticalpatent/JPS6013472B2/ja
Publication of JPS5557139ApublicationCriticalpatent/JPS5557139A/ja
Publication of JPS6013472B2publicationCriticalpatent/JPS6013472B2/ja