JPS555694B2 - - Google Patents
Info
- Publication number
- JPS555694B2 JPS555694B2 JP9615672A JP9615672A JPS555694B2 JP S555694 B2 JPS555694 B2 JP S555694B2 JP 9615672 A JP9615672 A JP 9615672A JP 9615672 A JP9615672 A JP 9615672A JP S555694 B2 JPS555694 B2 JP S555694B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9615672A JPS555694B2 (un) | 1972-09-27 | 1972-09-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9615672A JPS555694B2 (un) | 1972-09-27 | 1972-09-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4953763A JPS4953763A (un) | 1974-05-24 |
JPS555694B2 true JPS555694B2 (un) | 1980-02-08 |
Family
ID=14157483
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9615672A Expired JPS555694B2 (un) | 1972-09-27 | 1972-09-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS555694B2 (un) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694733A (en) * | 1979-12-28 | 1981-07-31 | Toshiba Ceramics Co Ltd | High purity crystal powder buffer for semiconductor |
-
1972
- 1972-09-27 JP JP9615672A patent/JPS555694B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS4953763A (un) | 1974-05-24 |