JPS5552674Y2 - - Google Patents
Info
- Publication number
- JPS5552674Y2 JPS5552674Y2 JP4555576U JP4555576U JPS5552674Y2 JP S5552674 Y2 JPS5552674 Y2 JP S5552674Y2 JP 4555576 U JP4555576 U JP 4555576U JP 4555576 U JP4555576 U JP 4555576U JP S5552674 Y2 JPS5552674 Y2 JP S5552674Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4555576U JPS5552674Y2 (en:Method) | 1976-04-14 | 1976-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4555576U JPS5552674Y2 (en:Method) | 1976-04-14 | 1976-04-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52137775U JPS52137775U (en:Method) | 1977-10-19 |
| JPS5552674Y2 true JPS5552674Y2 (en:Method) | 1980-12-06 |
Family
ID=28504636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4555576U Expired JPS5552674Y2 (en:Method) | 1976-04-14 | 1976-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5552674Y2 (en:Method) |
-
1976
- 1976-04-14 JP JP4555576U patent/JPS5552674Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52137775U (en:Method) | 1977-10-19 |