JPS5552143U - - Google Patents

Info

Publication number
JPS5552143U
JPS5552143U JP1978136539U JP13653978U JPS5552143U JP S5552143 U JPS5552143 U JP S5552143U JP 1978136539 U JP1978136539 U JP 1978136539U JP 13653978 U JP13653978 U JP 13653978U JP S5552143 U JPS5552143 U JP S5552143U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1978136539U
Other languages
Japanese (ja)
Other versions
JPS5819551Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978136539U priority Critical patent/JPS5819551Y2/ja
Publication of JPS5552143U publication Critical patent/JPS5552143U/ja
Application granted granted Critical
Publication of JPS5819551Y2 publication Critical patent/JPS5819551Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP1978136539U 1978-10-04 1978-10-04 フオトマスク Expired JPS5819551Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978136539U JPS5819551Y2 (ja) 1978-10-04 1978-10-04 フオトマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978136539U JPS5819551Y2 (ja) 1978-10-04 1978-10-04 フオトマスク

Publications (2)

Publication Number Publication Date
JPS5552143U true JPS5552143U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-04-07
JPS5819551Y2 JPS5819551Y2 (ja) 1983-04-22

Family

ID=29107857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978136539U Expired JPS5819551Y2 (ja) 1978-10-04 1978-10-04 フオトマスク

Country Status (1)

Country Link
JP (1) JPS5819551Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184768A (en) * 1981-05-02 1982-11-13 Ckd Corp Manually operating valve for safety
JPS59105647A (ja) * 1982-12-09 1984-06-19 Mitsubishi Electric Corp 電子ビーム露光方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4866374A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-12-08 1973-09-11
JPS5116878A (en) * 1974-08-01 1976-02-10 Fujitsu Ltd Hoto masukuno seizohoho

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4866374A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-12-08 1973-09-11
JPS5116878A (en) * 1974-08-01 1976-02-10 Fujitsu Ltd Hoto masukuno seizohoho

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184768A (en) * 1981-05-02 1982-11-13 Ckd Corp Manually operating valve for safety
JPS59105647A (ja) * 1982-12-09 1984-06-19 Mitsubishi Electric Corp 電子ビーム露光方法

Also Published As

Publication number Publication date
JPS5819551Y2 (ja) 1983-04-22

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