JPS5551336B2 - - Google Patents
Info
- Publication number
- JPS5551336B2 JPS5551336B2 JP7095276A JP7095276A JPS5551336B2 JP S5551336 B2 JPS5551336 B2 JP S5551336B2 JP 7095276 A JP7095276 A JP 7095276A JP 7095276 A JP7095276 A JP 7095276A JP S5551336 B2 JPS5551336 B2 JP S5551336B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7095276A JPS52154345A (en) | 1976-06-18 | 1976-06-18 | Liquid phase epitaxial growth apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7095276A JPS52154345A (en) | 1976-06-18 | 1976-06-18 | Liquid phase epitaxial growth apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52154345A JPS52154345A (en) | 1977-12-22 |
| JPS5551336B2 true JPS5551336B2 (show.php) | 1980-12-23 |
Family
ID=13446341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7095276A Granted JPS52154345A (en) | 1976-06-18 | 1976-06-18 | Liquid phase epitaxial growth apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52154345A (show.php) |
-
1976
- 1976-06-18 JP JP7095276A patent/JPS52154345A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52154345A (en) | 1977-12-22 |