JPS5550882B2 - - Google Patents

Info

Publication number
JPS5550882B2
JPS5550882B2 JP3413873A JP3413873A JPS5550882B2 JP S5550882 B2 JPS5550882 B2 JP S5550882B2 JP 3413873 A JP3413873 A JP 3413873A JP 3413873 A JP3413873 A JP 3413873A JP S5550882 B2 JPS5550882 B2 JP S5550882B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3413873A
Other languages
Japanese (ja)
Other versions
JPS49122500A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3413873A priority Critical patent/JPS5550882B2/ja
Publication of JPS49122500A publication Critical patent/JPS49122500A/ja
Publication of JPS5550882B2 publication Critical patent/JPS5550882B2/ja
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682Preparation by direct nitridation of silicon
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
JP3413873A 1973-03-27 1973-03-27 Expired JPS5550882B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3413873A JPS5550882B2 (enrdf_load_stackoverflow) 1973-03-27 1973-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3413873A JPS5550882B2 (enrdf_load_stackoverflow) 1973-03-27 1973-03-27

Publications (2)

Publication Number Publication Date
JPS49122500A JPS49122500A (enrdf_load_stackoverflow) 1974-11-22
JPS5550882B2 true JPS5550882B2 (enrdf_load_stackoverflow) 1980-12-20

Family

ID=12405845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3413873A Expired JPS5550882B2 (enrdf_load_stackoverflow) 1973-03-27 1973-03-27

Country Status (1)

Country Link
JP (1) JPS5550882B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006160548A (ja) * 2004-12-06 2006-06-22 Japan Atomic Energy Agency 単結晶窒化ケイ素ナノシートとその製造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117898A (en) * 1976-03-31 1977-10-03 Nippon Shinkinzoku Kk Process for peparing nitride
JPS5622611A (en) * 1979-07-28 1981-03-03 Sumitomo Electric Ind Ltd Manufacture of alpha-type silicon nitride powder
CA2003811C (en) * 1988-12-08 1997-01-14 Jochen Hintermayer Production of silicon nitride and the product thereby obtained

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006160548A (ja) * 2004-12-06 2006-06-22 Japan Atomic Energy Agency 単結晶窒化ケイ素ナノシートとその製造方法

Also Published As

Publication number Publication date
JPS49122500A (enrdf_load_stackoverflow) 1974-11-22

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