JPS5550882B2 - - Google Patents
Info
- Publication number
- JPS5550882B2 JPS5550882B2 JP3413873A JP3413873A JPS5550882B2 JP S5550882 B2 JPS5550882 B2 JP S5550882B2 JP 3413873 A JP3413873 A JP 3413873A JP 3413873 A JP3413873 A JP 3413873A JP S5550882 B2 JPS5550882 B2 JP S5550882B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0682—Preparation by direct nitridation of silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3413873A JPS5550882B2 (de) | 1973-03-27 | 1973-03-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3413873A JPS5550882B2 (de) | 1973-03-27 | 1973-03-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS49122500A JPS49122500A (de) | 1974-11-22 |
JPS5550882B2 true JPS5550882B2 (de) | 1980-12-20 |
Family
ID=12405845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3413873A Expired JPS5550882B2 (de) | 1973-03-27 | 1973-03-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5550882B2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006160548A (ja) * | 2004-12-06 | 2006-06-22 | Japan Atomic Energy Agency | 単結晶窒化ケイ素ナノシートとその製造方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52117898A (en) * | 1976-03-31 | 1977-10-03 | Nippon Shinkinzoku Kk | Process for peparing nitride |
JPS5622611A (en) * | 1979-07-28 | 1981-03-03 | Sumitomo Electric Ind Ltd | Manufacture of alpha-type silicon nitride powder |
CA2003811C (en) * | 1988-12-08 | 1997-01-14 | Jochen Hintermayer | Production of silicon nitride and the product thereby obtained |
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1973
- 1973-03-27 JP JP3413873A patent/JPS5550882B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006160548A (ja) * | 2004-12-06 | 2006-06-22 | Japan Atomic Energy Agency | 単結晶窒化ケイ素ナノシートとその製造方法 |
JP4572382B2 (ja) * | 2004-12-06 | 2010-11-04 | 独立行政法人 日本原子力研究開発機構 | 単結晶窒化ケイ素ナノシートとその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS49122500A (de) | 1974-11-22 |