JPS5548610U - - Google Patents
Info
- Publication number
- JPS5548610U JPS5548610U JP13030278U JP13030278U JPS5548610U JP S5548610 U JPS5548610 U JP S5548610U JP 13030278 U JP13030278 U JP 13030278U JP 13030278 U JP13030278 U JP 13030278U JP S5548610 U JPS5548610 U JP S5548610U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13030278U JPS5854784Y2 (en) | 1978-09-25 | 1978-09-25 | Stereo scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13030278U JPS5854784Y2 (en) | 1978-09-25 | 1978-09-25 | Stereo scanning electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5548610U true JPS5548610U (en) | 1980-03-29 |
| JPS5854784Y2 JPS5854784Y2 (en) | 1983-12-14 |
Family
ID=29095792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13030278U Expired JPS5854784Y2 (en) | 1978-09-25 | 1978-09-25 | Stereo scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5854784Y2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62129669U (en) * | 1986-02-07 | 1987-08-17 | ||
| JP2001015055A (en) * | 1999-04-15 | 2001-01-19 | Applied Materials Inc | Charged particle beam column |
| EP2023373A2 (en) | 2002-09-11 | 2009-02-11 | Hitachi High-Technologies Corporation | Charged particle beam apparatus and irradiation method |
| JP2010009907A (en) * | 2008-06-26 | 2010-01-14 | Hitachi High-Technologies Corp | Charged particle beam device |
| JP2011040240A (en) * | 2009-08-10 | 2011-02-24 | Hitachi High-Technologies Corp | Charged particle beam device, and image display method |
| DE112012005293B4 (en) | 2012-01-06 | 2021-08-05 | Hitachi High-Tech Corporation | Charged particle beam apparatus and display method for an inclined image |
-
1978
- 1978-09-25 JP JP13030278U patent/JPS5854784Y2/en not_active Expired
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62129669U (en) * | 1986-02-07 | 1987-08-17 | ||
| JP2001015055A (en) * | 1999-04-15 | 2001-01-19 | Applied Materials Inc | Charged particle beam column |
| EP2023373A2 (en) | 2002-09-11 | 2009-02-11 | Hitachi High-Technologies Corporation | Charged particle beam apparatus and irradiation method |
| JP2010009907A (en) * | 2008-06-26 | 2010-01-14 | Hitachi High-Technologies Corp | Charged particle beam device |
| JP2011040240A (en) * | 2009-08-10 | 2011-02-24 | Hitachi High-Technologies Corp | Charged particle beam device, and image display method |
| DE112010002918T5 (en) | 2009-08-10 | 2012-06-21 | Hitachi High-Technologies Corporation | Apparatus for a charged-particle beam and imaging display method |
| US9202669B2 (en) | 2009-08-10 | 2015-12-01 | Hitachi High-Technologies Corporation | Charged particle beam device and image display method for stereoscopic observation and stereoscopic display |
| DE112012005293B4 (en) | 2012-01-06 | 2021-08-05 | Hitachi High-Tech Corporation | Charged particle beam apparatus and display method for an inclined image |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5854784Y2 (en) | 1983-12-14 |