JPS5548106B2 - - Google Patents

Info

Publication number
JPS5548106B2
JPS5548106B2 JP534774A JP534774A JPS5548106B2 JP S5548106 B2 JPS5548106 B2 JP S5548106B2 JP 534774 A JP534774 A JP 534774A JP 534774 A JP534774 A JP 534774A JP S5548106 B2 JPS5548106 B2 JP S5548106B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP534774A
Other languages
Japanese (ja)
Other versions
JPS5099976A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP534774A priority Critical patent/JPS5548106B2/ja
Publication of JPS5099976A publication Critical patent/JPS5099976A/ja
Publication of JPS5548106B2 publication Critical patent/JPS5548106B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP534774A 1974-01-09 1974-01-09 Expired JPS5548106B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP534774A JPS5548106B2 (en:Method) 1974-01-09 1974-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP534774A JPS5548106B2 (en:Method) 1974-01-09 1974-01-09

Publications (2)

Publication Number Publication Date
JPS5099976A JPS5099976A (en:Method) 1975-08-08
JPS5548106B2 true JPS5548106B2 (en:Method) 1980-12-04

Family

ID=11608661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP534774A Expired JPS5548106B2 (en:Method) 1974-01-09 1974-01-09

Country Status (1)

Country Link
JP (1) JPS5548106B2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0375414U (en:Method) * 1989-11-24 1991-07-29

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5266756U (en:Method) * 1975-11-13 1977-05-17
JPS5596162U (en:Method) * 1978-12-25 1980-07-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0375414U (en:Method) * 1989-11-24 1991-07-29

Also Published As

Publication number Publication date
JPS5099976A (en:Method) 1975-08-08

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