JPS5547871Y2 - - Google Patents

Info

Publication number
JPS5547871Y2
JPS5547871Y2 JP8265577U JP8265577U JPS5547871Y2 JP S5547871 Y2 JPS5547871 Y2 JP S5547871Y2 JP 8265577 U JP8265577 U JP 8265577U JP 8265577 U JP8265577 U JP 8265577U JP S5547871 Y2 JPS5547871 Y2 JP S5547871Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8265577U
Other languages
Japanese (ja)
Other versions
JPS5410949U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8265577U priority Critical patent/JPS5547871Y2/ja
Publication of JPS5410949U publication Critical patent/JPS5410949U/ja
Application granted granted Critical
Publication of JPS5547871Y2 publication Critical patent/JPS5547871Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP8265577U 1977-06-23 1977-06-23 Expired JPS5547871Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8265577U JPS5547871Y2 (enrdf_load_stackoverflow) 1977-06-23 1977-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8265577U JPS5547871Y2 (enrdf_load_stackoverflow) 1977-06-23 1977-06-23

Publications (2)

Publication Number Publication Date
JPS5410949U JPS5410949U (enrdf_load_stackoverflow) 1979-01-24
JPS5547871Y2 true JPS5547871Y2 (enrdf_load_stackoverflow) 1980-11-10

Family

ID=29003714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8265577U Expired JPS5547871Y2 (enrdf_load_stackoverflow) 1977-06-23 1977-06-23

Country Status (1)

Country Link
JP (1) JPS5547871Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6021377A (ja) * 1983-07-15 1985-02-02 Nisshin Steel Co Ltd 付着量分布制御手段つき真空蒸着めつき装置

Also Published As

Publication number Publication date
JPS5410949U (enrdf_load_stackoverflow) 1979-01-24

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