JPS5547869Y2 - - Google Patents

Info

Publication number
JPS5547869Y2
JPS5547869Y2 JP9162176U JP9162176U JPS5547869Y2 JP S5547869 Y2 JPS5547869 Y2 JP S5547869Y2 JP 9162176 U JP9162176 U JP 9162176U JP 9162176 U JP9162176 U JP 9162176U JP S5547869 Y2 JPS5547869 Y2 JP S5547869Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9162176U
Other languages
Japanese (ja)
Other versions
JPS5310845U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9162176U priority Critical patent/JPS5547869Y2/ja
Publication of JPS5310845U publication Critical patent/JPS5310845U/ja
Application granted granted Critical
Publication of JPS5547869Y2 publication Critical patent/JPS5547869Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Physical Vapour Deposition (AREA)
JP9162176U 1976-07-12 1976-07-12 Expired JPS5547869Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9162176U JPS5547869Y2 (en:Method) 1976-07-12 1976-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9162176U JPS5547869Y2 (en:Method) 1976-07-12 1976-07-12

Publications (2)

Publication Number Publication Date
JPS5310845U JPS5310845U (en:Method) 1978-01-30
JPS5547869Y2 true JPS5547869Y2 (en:Method) 1980-11-10

Family

ID=28702221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9162176U Expired JPS5547869Y2 (en:Method) 1976-07-12 1976-07-12

Country Status (1)

Country Link
JP (1) JPS5547869Y2 (en:Method)

Also Published As

Publication number Publication date
JPS5310845U (en:Method) 1978-01-30

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