JPS5547429Y2 - - Google Patents

Info

Publication number
JPS5547429Y2
JPS5547429Y2 JP1976126612U JP12661276U JPS5547429Y2 JP S5547429 Y2 JPS5547429 Y2 JP S5547429Y2 JP 1976126612 U JP1976126612 U JP 1976126612U JP 12661276 U JP12661276 U JP 12661276U JP S5547429 Y2 JPS5547429 Y2 JP S5547429Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976126612U
Other languages
Japanese (ja)
Other versions
JPS5344925U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976126612U priority Critical patent/JPS5547429Y2/ja
Publication of JPS5344925U publication Critical patent/JPS5344925U/ja
Application granted granted Critical
Publication of JPS5547429Y2 publication Critical patent/JPS5547429Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Carpets (AREA)
JP1976126612U 1976-09-22 1976-09-22 Expired JPS5547429Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976126612U JPS5547429Y2 (enrdf_load_stackoverflow) 1976-09-22 1976-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976126612U JPS5547429Y2 (enrdf_load_stackoverflow) 1976-09-22 1976-09-22

Publications (2)

Publication Number Publication Date
JPS5344925U JPS5344925U (enrdf_load_stackoverflow) 1978-04-17
JPS5547429Y2 true JPS5547429Y2 (enrdf_load_stackoverflow) 1980-11-06

Family

ID=28735990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976126612U Expired JPS5547429Y2 (enrdf_load_stackoverflow) 1976-09-22 1976-09-22

Country Status (1)

Country Link
JP (1) JPS5547429Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6241473A (ja) * 1985-08-17 1987-02-23 Kiyoshi Takahashi 真空ピンセット
JPS6365640A (ja) * 1986-09-05 1988-03-24 Kokusai Electric Co Ltd ウエハの着脱方法及び装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4735123U (enrdf_load_stackoverflow) * 1971-05-08 1972-12-19
JPS4839718U (enrdf_load_stackoverflow) * 1971-09-13 1973-05-18
JPS5144581Y2 (enrdf_load_stackoverflow) * 1972-05-01 1976-10-29
JPS5044280Y2 (enrdf_load_stackoverflow) * 1972-05-13 1975-12-17

Also Published As

Publication number Publication date
JPS5344925U (enrdf_load_stackoverflow) 1978-04-17

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