JPS5547109B2 - - Google Patents
Info
- Publication number
- JPS5547109B2 JPS5547109B2 JP731440A JP144073A JPS5547109B2 JP S5547109 B2 JPS5547109 B2 JP S5547109B2 JP 731440 A JP731440 A JP 731440A JP 144073 A JP144073 A JP 144073A JP S5547109 B2 JPS5547109 B2 JP S5547109B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP731440A JPS5547109B2 (en:Method) | 1972-12-28 | 1972-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP731440A JPS5547109B2 (en:Method) | 1972-12-28 | 1972-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4990284A JPS4990284A (en:Method) | 1974-08-28 |
| JPS5547109B2 true JPS5547109B2 (en:Method) | 1980-11-27 |
Family
ID=11501487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP731440A Expired JPS5547109B2 (en:Method) | 1972-12-28 | 1972-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5547109B2 (en:Method) |
-
1972
- 1972-12-28 JP JP731440A patent/JPS5547109B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4990284A (en:Method) | 1974-08-28 |