JPS55468B2 - - Google Patents
Info
- Publication number
- JPS55468B2 JPS55468B2 JP2505376A JP2505376A JPS55468B2 JP S55468 B2 JPS55468 B2 JP S55468B2 JP 2505376 A JP2505376 A JP 2505376A JP 2505376 A JP2505376 A JP 2505376A JP S55468 B2 JPS55468 B2 JP S55468B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2505376A JPS52108381A (en) | 1976-03-10 | 1976-03-10 | Ionnspattering apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2505376A JPS52108381A (en) | 1976-03-10 | 1976-03-10 | Ionnspattering apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52108381A JPS52108381A (en) | 1977-09-10 |
| JPS55468B2 true JPS55468B2 (en) | 1980-01-08 |
Family
ID=12155166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2505376A Granted JPS52108381A (en) | 1976-03-10 | 1976-03-10 | Ionnspattering apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52108381A (en) |
-
1976
- 1976-03-10 JP JP2505376A patent/JPS52108381A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52108381A (en) | 1977-09-10 |