JPS554561B2 - - Google Patents
Info
- Publication number
- JPS554561B2 JPS554561B2 JP10089875A JP10089875A JPS554561B2 JP S554561 B2 JPS554561 B2 JP S554561B2 JP 10089875 A JP10089875 A JP 10089875A JP 10089875 A JP10089875 A JP 10089875A JP S554561 B2 JPS554561 B2 JP S554561B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Producing Shaped Articles From Materials (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10089875A JPS5224208A (en) | 1975-08-20 | 1975-08-20 | Manufacture of fine thin films |
| US05/871,609 US4209477A (en) | 1975-08-20 | 1978-01-23 | Process for preparing a film of densely packed structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10089875A JPS5224208A (en) | 1975-08-20 | 1975-08-20 | Manufacture of fine thin films |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5224208A JPS5224208A (en) | 1977-02-23 |
| JPS554561B2 true JPS554561B2 (show.php) | 1980-01-31 |
Family
ID=14286149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10089875A Granted JPS5224208A (en) | 1975-08-20 | 1975-08-20 | Manufacture of fine thin films |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5224208A (show.php) |
-
1975
- 1975-08-20 JP JP10089875A patent/JPS5224208A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5224208A (en) | 1977-02-23 |