JPS5545369Y2 - - Google Patents
Info
- Publication number
- JPS5545369Y2 JPS5545369Y2 JP1976160340U JP16034076U JPS5545369Y2 JP S5545369 Y2 JPS5545369 Y2 JP S5545369Y2 JP 1976160340 U JP1976160340 U JP 1976160340U JP 16034076 U JP16034076 U JP 16034076U JP S5545369 Y2 JPS5545369 Y2 JP S5545369Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
- Microscoopes, Condenser (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976160340U JPS5545369Y2 (zh) | 1976-11-30 | 1976-11-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976160340U JPS5545369Y2 (zh) | 1976-11-30 | 1976-11-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5376941U JPS5376941U (zh) | 1978-06-27 |
JPS5545369Y2 true JPS5545369Y2 (zh) | 1980-10-24 |
Family
ID=28768228
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1976160340U Expired JPS5545369Y2 (zh) | 1976-11-30 | 1976-11-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5545369Y2 (zh) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3902615A (en) * | 1973-03-12 | 1975-09-02 | Computervision Corp | Automatic wafer loading and pre-alignment system |
-
1976
- 1976-11-30 JP JP1976160340U patent/JPS5545369Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3902615A (en) * | 1973-03-12 | 1975-09-02 | Computervision Corp | Automatic wafer loading and pre-alignment system |
Also Published As
Publication number | Publication date |
---|---|
JPS5376941U (zh) | 1978-06-27 |