JPS5545033B2 - - Google Patents

Info

Publication number
JPS5545033B2
JPS5545033B2 JP11463976A JP11463976A JPS5545033B2 JP S5545033 B2 JPS5545033 B2 JP S5545033B2 JP 11463976 A JP11463976 A JP 11463976A JP 11463976 A JP11463976 A JP 11463976A JP S5545033 B2 JPS5545033 B2 JP S5545033B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11463976A
Other languages
Japanese (ja)
Other versions
JPS5342919A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11463976A priority Critical patent/JPS5342919A/ja
Publication of JPS5342919A publication Critical patent/JPS5342919A/ja
Publication of JPS5545033B2 publication Critical patent/JPS5545033B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP11463976A 1976-09-27 1976-09-27 Electromagnetic type selector Granted JPS5342919A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11463976A JPS5342919A (en) 1976-09-27 1976-09-27 Electromagnetic type selector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11463976A JPS5342919A (en) 1976-09-27 1976-09-27 Electromagnetic type selector

Publications (2)

Publication Number Publication Date
JPS5342919A JPS5342919A (en) 1978-04-18
JPS5545033B2 true JPS5545033B2 (ru) 1980-11-15

Family

ID=14642834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11463976A Granted JPS5342919A (en) 1976-09-27 1976-09-27 Electromagnetic type selector

Country Status (1)

Country Link
JP (1) JPS5342919A (ru)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59195204U (ja) * 1983-06-13 1984-12-25 株式会社 神崎高級工機製作所 対地作業機の姿勢制御用バルブ装置
JPS60186107U (ja) * 1984-05-21 1985-12-10 株式会社 アマダ 回転エア−シリンダ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002112526A (ja) * 2000-06-26 2002-04-12 Nikon Corp 平面モータ、ステージ位置決めシステム、露光装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59195204U (ja) * 1983-06-13 1984-12-25 株式会社 神崎高級工機製作所 対地作業機の姿勢制御用バルブ装置
JPS60186107U (ja) * 1984-05-21 1985-12-10 株式会社 アマダ 回転エア−シリンダ

Also Published As

Publication number Publication date
JPS5342919A (en) 1978-04-18

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