JPS5544355Y2 - - Google Patents
Info
- Publication number
- JPS5544355Y2 JPS5544355Y2 JP1975144058U JP14405875U JPS5544355Y2 JP S5544355 Y2 JPS5544355 Y2 JP S5544355Y2 JP 1975144058 U JP1975144058 U JP 1975144058U JP 14405875 U JP14405875 U JP 14405875U JP S5544355 Y2 JPS5544355 Y2 JP S5544355Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975144058U JPS5544355Y2 (https=) | 1975-10-22 | 1975-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975144058U JPS5544355Y2 (https=) | 1975-10-22 | 1975-10-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5257567U JPS5257567U (https=) | 1977-04-26 |
| JPS5544355Y2 true JPS5544355Y2 (https=) | 1980-10-17 |
Family
ID=28623806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975144058U Expired JPS5544355Y2 (https=) | 1975-10-22 | 1975-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5544355Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266361A (ja) * | 2006-03-29 | 2007-10-11 | Nuflare Technology Inc | 基板のアース機構及び荷電粒子ビーム描画装置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54101738U (https=) * | 1977-12-28 | 1979-07-18 | ||
| JPH0217476Y2 (https=) * | 1981-01-23 | 1990-05-16 | ||
| JPH0726730Y2 (ja) * | 1987-05-29 | 1995-06-14 | 工業技術院長 | 精密位置決め機構 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS497700A (https=) * | 1972-05-26 | 1974-01-23 | ||
| JPS5010949B2 (https=) * | 1972-07-07 | 1975-04-25 |
-
1975
- 1975-10-22 JP JP1975144058U patent/JPS5544355Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266361A (ja) * | 2006-03-29 | 2007-10-11 | Nuflare Technology Inc | 基板のアース機構及び荷電粒子ビーム描画装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5257567U (https=) | 1977-04-26 |