JPS5542871B2 - - Google Patents
Info
- Publication number
- JPS5542871B2 JPS5542871B2 JP12952475A JP12952475A JPS5542871B2 JP S5542871 B2 JPS5542871 B2 JP S5542871B2 JP 12952475 A JP12952475 A JP 12952475A JP 12952475 A JP12952475 A JP 12952475A JP S5542871 B2 JPS5542871 B2 JP S5542871B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12952475A JPS5252475A (en) | 1975-10-27 | 1975-10-27 | Cleaning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12952475A JPS5252475A (en) | 1975-10-27 | 1975-10-27 | Cleaning system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5252475A JPS5252475A (en) | 1977-04-27 |
| JPS5542871B2 true JPS5542871B2 (cs) | 1980-11-01 |
Family
ID=15011625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12952475A Granted JPS5252475A (en) | 1975-10-27 | 1975-10-27 | Cleaning system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5252475A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3683485B2 (ja) * | 2000-09-05 | 2005-08-17 | 東京応化工業株式会社 | 洗浄液の供給システム |
-
1975
- 1975-10-27 JP JP12952475A patent/JPS5252475A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5252475A (en) | 1977-04-27 |