JPS5542414B2 - - Google Patents
Info
- Publication number
- JPS5542414B2 JPS5542414B2 JP7181772A JP7181772A JPS5542414B2 JP S5542414 B2 JPS5542414 B2 JP S5542414B2 JP 7181772 A JP7181772 A JP 7181772A JP 7181772 A JP7181772 A JP 7181772A JP S5542414 B2 JPS5542414 B2 JP S5542414B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Numerical Control (AREA)
- Indexing, Searching, Synchronizing, And The Amount Of Synchronization Travel Of Record Carriers (AREA)
- Programmable Controllers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7181772A JPS5542414B2 (ja) | 1972-07-18 | 1972-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7181772A JPS5542414B2 (ja) | 1972-07-18 | 1972-07-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4928790A JPS4928790A (ja) | 1974-03-14 |
| JPS5542414B2 true JPS5542414B2 (ja) | 1980-10-30 |
Family
ID=13471477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7181772A Expired JPS5542414B2 (ja) | 1972-07-18 | 1972-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5542414B2 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51128271A (en) * | 1975-04-30 | 1976-11-09 | Fujitsu Ltd | Semiconductor unit |
| JPS6036110B2 (ja) * | 1976-12-09 | 1985-08-19 | 工業技術院長 | 半導体装置 |
-
1972
- 1972-07-18 JP JP7181772A patent/JPS5542414B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4928790A (ja) | 1974-03-14 |