JPS5542402B2 - - Google Patents
Info
- Publication number
- JPS5542402B2 JPS5542402B2 JP4751775A JP4751775A JPS5542402B2 JP S5542402 B2 JPS5542402 B2 JP S5542402B2 JP 4751775 A JP4751775 A JP 4751775A JP 4751775 A JP4751775 A JP 4751775A JP S5542402 B2 JPS5542402 B2 JP S5542402B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4751775A JPS51123491A (en) | 1975-04-21 | 1975-04-21 | Digital servo-control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4751775A JPS51123491A (en) | 1975-04-21 | 1975-04-21 | Digital servo-control system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51123491A JPS51123491A (en) | 1976-10-28 |
| JPS5542402B2 true JPS5542402B2 (it) | 1980-10-30 |
Family
ID=12777290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4751775A Granted JPS51123491A (en) | 1975-04-21 | 1975-04-21 | Digital servo-control system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51123491A (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220053488A (ko) | 2020-10-22 | 2022-04-29 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 오늄염, 화학 증폭 레지스트 조성물 및 패턴 형성 방법 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5745615A (en) * | 1980-09-01 | 1982-03-15 | Toshiba Corp | Rotatable body driving device |
| JPS59121409A (ja) * | 1982-12-28 | 1984-07-13 | Ube Ind Ltd | 位置決め制御方法および装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS504480A (it) * | 1973-05-17 | 1975-01-17 |
-
1975
- 1975-04-21 JP JP4751775A patent/JPS51123491A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS504480A (it) * | 1973-05-17 | 1975-01-17 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220053488A (ko) | 2020-10-22 | 2022-04-29 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 오늄염, 화학 증폭 레지스트 조성물 및 패턴 형성 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51123491A (en) | 1976-10-28 |