JPS5540760Y2 - - Google Patents
Info
- Publication number
- JPS5540760Y2 JPS5540760Y2 JP7213976U JP7213976U JPS5540760Y2 JP S5540760 Y2 JPS5540760 Y2 JP S5540760Y2 JP 7213976 U JP7213976 U JP 7213976U JP 7213976 U JP7213976 U JP 7213976U JP S5540760 Y2 JPS5540760 Y2 JP S5540760Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7213976U JPS5540760Y2 (en) | 1976-06-04 | 1976-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7213976U JPS5540760Y2 (en) | 1976-06-04 | 1976-06-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52162867U JPS52162867U (en) | 1977-12-09 |
| JPS5540760Y2 true JPS5540760Y2 (en) | 1980-09-24 |
Family
ID=28543182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7213976U Expired JPS5540760Y2 (en) | 1976-06-04 | 1976-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5540760Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004319902A (en) * | 2003-04-18 | 2004-11-11 | Advantest Corp | Stage device and exposure device |
-
1976
- 1976-06-04 JP JP7213976U patent/JPS5540760Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52162867U (en) | 1977-12-09 |