JPS5540351B2 - - Google Patents
Info
- Publication number
- JPS5540351B2 JPS5540351B2 JP10609072A JP10609072A JPS5540351B2 JP S5540351 B2 JPS5540351 B2 JP S5540351B2 JP 10609072 A JP10609072 A JP 10609072A JP 10609072 A JP10609072 A JP 10609072A JP S5540351 B2 JPS5540351 B2 JP S5540351B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Machine Tool Copy Controls (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10609072A JPS5540351B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-10-23 | 1972-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10609072A JPS5540351B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-10-23 | 1972-10-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4964535A JPS4964535A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-06-22 |
| JPS5540351B2 true JPS5540351B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-10-17 |
Family
ID=14424836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10609072A Expired JPS5540351B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-10-23 | 1972-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5540351B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11107705B2 (en) | 2018-07-30 | 2021-08-31 | Samsung Electronics Co., Ltd. | Cleaning solution production systems and methods, and plasma reaction tanks |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5513025Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1978-09-26 | 1980-03-24 |
-
1972
- 1972-10-23 JP JP10609072A patent/JPS5540351B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11107705B2 (en) | 2018-07-30 | 2021-08-31 | Samsung Electronics Co., Ltd. | Cleaning solution production systems and methods, and plasma reaction tanks |
| US11664242B2 (en) | 2018-07-30 | 2023-05-30 | Samsung Electronics Co., Ltd. | Cleaning solution production systems and methods, and plasma reaction tanks |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4964535A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-06-22 |