JPS5538424A - Device for dry quenching of pellet - Google Patents

Device for dry quenching of pellet

Info

Publication number
JPS5538424A
JPS5538424A JP11078178A JP11078178A JPS5538424A JP S5538424 A JPS5538424 A JP S5538424A JP 11078178 A JP11078178 A JP 11078178A JP 11078178 A JP11078178 A JP 11078178A JP S5538424 A JPS5538424 A JP S5538424A
Authority
JP
Japan
Prior art keywords
pellet
dry quenching
quenching
dry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11078178A
Other languages
Japanese (ja)
Inventor
Akihiko Satou
Shinaya Okamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11078178A priority Critical patent/JPS5538424A/en
Publication of JPS5538424A publication Critical patent/JPS5538424A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68313Auxiliary support including a cavity for storing a finished device, e.g. IC package, or a partly finished device, e.g. die, during manufacturing or mounting
JP11078178A 1978-09-11 1978-09-11 Device for dry quenching of pellet Pending JPS5538424A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11078178A JPS5538424A (en) 1978-09-11 1978-09-11 Device for dry quenching of pellet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11078178A JPS5538424A (en) 1978-09-11 1978-09-11 Device for dry quenching of pellet

Publications (1)

Publication Number Publication Date
JPS5538424A true JPS5538424A (en) 1980-03-17

Family

ID=14544443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11078178A Pending JPS5538424A (en) 1978-09-11 1978-09-11 Device for dry quenching of pellet

Country Status (1)

Country Link
JP (1) JPS5538424A (en)

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