JPS5538424A - Device for dry quenching of pellet - Google Patents
Device for dry quenching of pelletInfo
- Publication number
- JPS5538424A JPS5538424A JP11078178A JP11078178A JPS5538424A JP S5538424 A JPS5538424 A JP S5538424A JP 11078178 A JP11078178 A JP 11078178A JP 11078178 A JP11078178 A JP 11078178A JP S5538424 A JPS5538424 A JP S5538424A
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- dry quenching
- quenching
- dry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68313—Auxiliary support including a cavity for storing a finished device, e.g. IC package, or a partly finished device, e.g. die, during manufacturing or mounting
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11078178A JPS5538424A (en) | 1978-09-11 | 1978-09-11 | Device for dry quenching of pellet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11078178A JPS5538424A (en) | 1978-09-11 | 1978-09-11 | Device for dry quenching of pellet |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5538424A true JPS5538424A (en) | 1980-03-17 |
Family
ID=14544443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11078178A Pending JPS5538424A (en) | 1978-09-11 | 1978-09-11 | Device for dry quenching of pellet |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5538424A (en) |
-
1978
- 1978-09-11 JP JP11078178A patent/JPS5538424A/en active Pending
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