JPS5538115Y2 - - Google Patents

Info

Publication number
JPS5538115Y2
JPS5538115Y2 JP8880576U JP8880576U JPS5538115Y2 JP S5538115 Y2 JPS5538115 Y2 JP S5538115Y2 JP 8880576 U JP8880576 U JP 8880576U JP 8880576 U JP8880576 U JP 8880576U JP S5538115 Y2 JPS5538115 Y2 JP S5538115Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8880576U
Other languages
Japanese (ja)
Other versions
JPS537148U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8880576U priority Critical patent/JPS5538115Y2/ja
Publication of JPS537148U publication Critical patent/JPS537148U/ja
Application granted granted Critical
Publication of JPS5538115Y2 publication Critical patent/JPS5538115Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP8880576U 1976-07-06 1976-07-06 Expired JPS5538115Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8880576U JPS5538115Y2 (en:Method) 1976-07-06 1976-07-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8880576U JPS5538115Y2 (en:Method) 1976-07-06 1976-07-06

Publications (2)

Publication Number Publication Date
JPS537148U JPS537148U (en:Method) 1978-01-21
JPS5538115Y2 true JPS5538115Y2 (en:Method) 1980-09-06

Family

ID=28699526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8880576U Expired JPS5538115Y2 (en:Method) 1976-07-06 1976-07-06

Country Status (1)

Country Link
JP (1) JPS5538115Y2 (en:Method)

Also Published As

Publication number Publication date
JPS537148U (en:Method) 1978-01-21

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