JPS5538047B2 - - Google Patents
Info
- Publication number
- JPS5538047B2 JPS5538047B2 JP13175476A JP13175476A JPS5538047B2 JP S5538047 B2 JPS5538047 B2 JP S5538047B2 JP 13175476 A JP13175476 A JP 13175476A JP 13175476 A JP13175476 A JP 13175476A JP S5538047 B2 JPS5538047 B2 JP S5538047B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13175476A JPS5357753A (en) | 1976-11-04 | 1976-11-04 | Diffusion layer formation method to semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13175476A JPS5357753A (en) | 1976-11-04 | 1976-11-04 | Diffusion layer formation method to semiconductor substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5357753A JPS5357753A (en) | 1978-05-25 |
| JPS5538047B2 true JPS5538047B2 (OSRAM) | 1980-10-02 |
Family
ID=15065397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13175476A Granted JPS5357753A (en) | 1976-11-04 | 1976-11-04 | Diffusion layer formation method to semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5357753A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109755113B (zh) * | 2017-11-01 | 2021-08-10 | 天津环鑫科技发展有限公司 | 一种调节扩散气氛的一次扩散工艺 |
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1976
- 1976-11-04 JP JP13175476A patent/JPS5357753A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5357753A (en) | 1978-05-25 |