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Priority to JP4285675ApriorityCriticalpatent/JPS51117985A/ja
Publication of JPS51117985ApublicationCriticalpatent/JPS51117985A/ja
Publication of JPS5538030B2publicationCriticalpatent/JPS5538030B2/ja
C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
C23C14/04—Coating on selected surface areas, e.g. using masks
C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
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Chemical & Material Sciences
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Chemical Kinetics & Catalysis
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Engineering & Computer Science
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Materials Engineering
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Mechanical Engineering
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Metallurgy
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Organic Chemistry
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Physical Vapour Deposition
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JP4285675A1975-04-101975-04-10An apparatus for coating hollow tubes
GrantedJPS51117985A
(en)