JPS5538028B2 - - Google Patents

Info

Publication number
JPS5538028B2
JPS5538028B2 JP2033575A JP2033575A JPS5538028B2 JP S5538028 B2 JPS5538028 B2 JP S5538028B2 JP 2033575 A JP2033575 A JP 2033575A JP 2033575 A JP2033575 A JP 2033575A JP S5538028 B2 JPS5538028 B2 JP S5538028B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2033575A
Other languages
Japanese (ja)
Other versions
JPS5195988A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2033575A priority Critical patent/JPS5538028B2/ja
Publication of JPS5195988A publication Critical patent/JPS5195988A/ja
Publication of JPS5538028B2 publication Critical patent/JPS5538028B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2033575A 1975-02-20 1975-02-20 Expired JPS5538028B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2033575A JPS5538028B2 (en:Method) 1975-02-20 1975-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2033575A JPS5538028B2 (en:Method) 1975-02-20 1975-02-20

Publications (2)

Publication Number Publication Date
JPS5195988A JPS5195988A (en:Method) 1976-08-23
JPS5538028B2 true JPS5538028B2 (en:Method) 1980-10-01

Family

ID=12024255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2033575A Expired JPS5538028B2 (en:Method) 1975-02-20 1975-02-20

Country Status (1)

Country Link
JP (1) JPS5538028B2 (en:Method)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4110661Y1 (en:Method) * 1964-02-19 1966-05-19
JPS432981Y1 (en:Method) * 1965-11-08 1968-02-07
JPS5031881B2 (en:Method) * 1971-09-16 1975-10-16

Also Published As

Publication number Publication date
JPS5195988A (en:Method) 1976-08-23

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